发明授权
US09052494B2 Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths
有权
具有反射目标的光学成像系统; 宽带客观镜面; 以及具有两个或更多个成像路径的折射透镜和宽带光学成像系统
- 专利标题: Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths
- 专利标题(中): 具有反射目标的光学成像系统; 宽带客观镜面; 以及具有两个或更多个成像路径的折射透镜和宽带光学成像系统
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申请号: US12750488申请日: 2010-03-30
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公开(公告)号: US09052494B2公开(公告)日: 2015-06-09
- 发明人: Shiow-Hwei Hwang , Gregory L. Kirk , Hwan J. Jeong , David Shafer , Russel Hudyma
- 申请人: Shiow-Hwei Hwang , Gregory L. Kirk , Hwan J. Jeong , David Shafer , Russel Hudyma
- 申请人地址: US CA Milptas
- 专利权人: KLA-Tencor Technologies Corporation
- 当前专利权人: KLA-Tencor Technologies Corporation
- 当前专利权人地址: US CA Milptas
- 代理机构: JDI Patent
- 代理商 Joshua D. Isenberg
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; G02B17/08 ; G01N21/95 ; G03F1/84
摘要:
An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio 0.7, central obscuration 0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.
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