发明授权
- 专利标题: Dielectric composition for thin-film transistors
- 专利标题(中): 薄膜晶体管的介电组成
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申请号: US12768038申请日: 2010-04-27
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公开(公告)号: US09076975B2公开(公告)日: 2015-07-07
- 发明人: Yiliang Wu , Ping Liu , Anthony James Wigglesworth , Nan-Xing Hu
- 申请人: Yiliang Wu , Ping Liu , Anthony James Wigglesworth , Nan-Xing Hu
- 申请人地址: US CT Norwalk
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Norwalk
- 代理机构: Fay Sharpe LLP
- 主分类号: H01L21/31
- IPC分类号: H01L21/31 ; H01L51/05 ; H01L21/268 ; H01L51/00 ; C08K5/00
摘要:
An electronic device, such as a thin-film transistor, includes a substrate and a dielectric layer formed from a dielectric composition. The dielectric composition includes a dielectric material, a crosslinking agent, and an infrared absorbing agent. In particular embodiments, the dielectric material comprises a lower-k dielectric material and a higher-k dielectric polymer. When deposited, the lower-k dielectric material and the higher-k dielectric material form separate phases. The infrared absorbing agent allows the dielectric composition to attain a temperature that is significantly greater than the temperature attained by the substrate during curing. This difference in temperature allows the dielectric layer to be cured at relatively high temperatures and/or shorter time periods, permitting the selection of lower-cost substrate materials that would otherwise be deformed by the curing of the dielectric layer.
公开/授权文献
- US20110260283A1 DIELECTRIC COMPOSITION FOR THIN-FILM TRANSISTORS 公开/授权日:2011-10-27
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