发明授权
- 专利标题： High dielectric nanosheet laminate, high dielectric element and method for producing the same
- 专利标题（中）： 高电介质纳米片层压板，高介电元件及其制造方法
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申请号： US14118354申请日： 2012-05-18
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公开(公告)号： US09082551B2公开(公告)日： 2015-07-14
- 发明人: Minoru Osada , Yasuo Ebina , Takayoshi Sasaki
- 申请人： Minoru Osada , Yasuo Ebina , Takayoshi Sasaki
- 申请人地址： JP Ibaraki
- 专利权人： NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- 当前专利权人： NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- 当前专利权人地址： JP Ibaraki
- 代理机构： Wenderoth, Lind & Ponack, L.L.P.
- 优先权： JP2011-112462 20110519
- 国际申请： PCT/JP2012/062765 WO 20120518
- 国际公布： WO2012/157740 WO 20121122
- 主分类号： H01G4/10
- IPC分类号： H01G4/10 ; H01L49/02 ; B82Y30/00 ; H01L21/02 ; B32B18/00 ; C04B35/495 ; C04B35/626 ; C01G33/00 ; H01L21/8234 ; H01L27/08
摘要：
A high dielectric nanosheet laminate is produced by laminating nanosheets, each of which has a thickness of 10 nm or less and is formed of an oxide that has a perovskite structure wherein at least four NbO6 octahedrons, TaO6 octahedrons or TiO6 octahedrons are included in a unit lattice. Consequently, the high dielectric nanosheet laminate is capable of achieving a high dielectric constant and a satisfactory insulation property, which are preferable for high dielectric nanosheet multilayer capacitors or the like, at the same time even if formed very thin.
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