Invention Grant
- Patent Title: Vapor deposition method and method for manufacturing organic electroluminescent display device
- Patent Title (中): 蒸镀法及制造有机电致发光显示装置的方法
-
Application No.: US13992613Application Date: 2011-12-07
-
Publication No.: US09093646B2Publication Date: 2015-07-28
- Inventor: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- Applicant: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Morrison & Foerster LLP
- Priority: JP2010-278500 20101214
- International Application: PCT/JP2011/078328 WO 20111207
- International Announcement: WO2012/081476 WO 20120621
- Main IPC: H01L51/00
- IPC: H01L51/00 ; C23C14/24 ; C23C14/56 ; H01L27/32 ; H01L51/56

Abstract:
A vapor deposition device (50) in accordance with the present invention is a vapor deposition device for forming a film on a film formation substrate (60), including: a vapor deposition source (91) which has a plurality of injection holes (92) from which vapor deposition particles are to be injected towards the film formation substrate (60), the plurality of injection holes (92) being arranged in a line or in a plurality of lines; a vapor deposition crucible (93) for supplying the vapor deposition particles to the vapor deposition source (91) via a pipe (94), the pipe being connected to the vapor deposition source (91) on a side where one end of the line(s) of the plurality of injection holes (92) is located; moving means for moving the film formation substrate (60) relative to the vapor deposition source(s) (91); and a rotation mechanism (100) for rotating the vapor deposition source (91).
Public/Granted literature
Information query
IPC分类: