发明授权
- 专利标题： Micro pick up array mount with integrated displacement sensor
- 专利标题（中）： 微型拾取阵列安装带集成位移传感器
-
申请号： US13776188申请日： 2013-02-25
-
公开(公告)号： US09095980B2公开(公告)日： 2015-08-04
- 发明人: Dariusz Golda , John A. Higginson , Andreas Bibl , Paul Argus Parks , Stephen Paul Bathurst
- 申请人： LuxVue Technology Corporation
- 申请人地址： US CA Santa Clara
- 专利权人： LuxVue Technology Corporation
- 当前专利权人： LuxVue Technology Corporation
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号： B25J11/00
- IPC分类号： B25J11/00 ; H01L21/00 ; B25J15/00
摘要：
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.