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    Mass transfer tool manipulator assembly with remote center of compliance
    1.
    发明授权
    Mass transfer tool manipulator assembly with remote center of compliance 有权
    质量传递工具机械手组装与远程中心的合规

    公开(公告)号：US09522468B2

    公开(公告)日：2016-12-20

    申请号：US14273298

    申请日：2014-05-08

    申请人： LuxVue Technology Corporation

    发明人： Paul Argus Parks ,  Nile Alexander Light ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl

    IPC分类号： B65G47/90 ,  B25J7/00 ,  B25J18/00 ,  B25J9/00

    CPC分类号： B25J7/00 ,  B25J9/0015 ,  B25J18/007 ,  H01L2224/7565 ,  H01L2224/75822 ,  Y10T74/20354

    摘要： Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

    摘要翻译： 公开了用于将微器件或微阵列阵列转移到衬底或从衬底传送微阵列的系统和方法。 在一个实施例中，远程中心机器人允许微拾取阵列和目标基板之间的即时对准。 远程中心机器人可以包括独立移动并共享远程旋转中心的多个对称联动。 在一个实施例中，远程旋转中心可以定位在微拾取阵列的表面处，以防止在传送期间损坏微器件阵列。

    MICRO PICK UP ARRAY ALIGNMENT ENCODER
    2.
    发明申请
    MICRO PICK UP ARRAY ALIGNMENT ENCODER 有权
    微控制器阵列编码器

    公开(公告)号：US20150021466A1

    公开(公告)日：2015-01-22

    申请号：US13948039

    申请日：2013-07-22

    申请人： LuxVue Technology Corporation

    发明人： Andreas Bibl ,  Paul Argus Parks

    IPC分类号： H01L21/683 ,  B25J15/00 ,  H01L21/68 ,  G01D5/347

    CPC分类号： B25J15/0085 ,  G01D5/347 ,  H01L21/67144 ,  H01L21/681

    摘要： Micro pick up arrays and methods for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array alignment encoder detects relative position between a micro pick up array having an encoder scale and a target substrate having a corresponding reference scale. In an embodiment, the micro pick up array alignment encoder facilitates alignment of the micro pick up array with the target substrate.

    摘要翻译： 公开了用于从载体衬底传送微器件的微拾取阵列和方法。 在一个实施例中，微拾取阵列对准编码器检测具有编码器刻度的微拾取阵列和具有相应参考刻度的目标衬底之间的相对位置。 在一个实施例中，微拾取阵列对准编码器有利于微拾取阵列与目标衬底的对准。

    Micro Pick Up Array Mount With Integrated Displacement Sensor
    3.
    发明申请
    Micro Pick Up Array Mount With Integrated Displacement Sensor 有权
    微型拾取阵列安装与集成位移传感器

    公开(公告)号：US20140241844A1

    公开(公告)日：2014-08-28

    申请号：US13776188

    申请日：2013-02-25

    申请人： LUXVUE TECHNOLOGY CORPORATION

    发明人： Dariusz Golda ,  John A. Higginson ,  Andreas Bibl ,  Paul Argus Parks ,  Stephen Paul Bathurst

    IPC分类号： B25J11/00 ,  B25J15/00

    CPC分类号： B25J11/00 ,  B25J7/00 ,  B25J9/0015 ,  B25J15/0052 ,  B25J15/0085 ,  H01L24/75 ,  H01L2224/7598

    摘要： Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.

    摘要翻译： 公开了用于从载体衬底传送微器件的系统和方法。 在一个实施例中，质量传递工具操纵器组件允许在微拾取阵列上的静电转印头阵列和载体衬底上的微器件阵列之间的主动对准。 可以检测质量传递工具操纵器组件的柔性元件的位移，以控制静电转印头阵列与微器件阵列之间的对准。

    MICRO PICK UP ARRAY PIVOT MOUNT DESIGN FOR STRAIN AMPLIFICATION
    4.
    发明申请
    MICRO PICK UP ARRAY PIVOT MOUNT DESIGN FOR STRAIN AMPLIFICATION 有权
    微型拾取阵列装置设计用于应变放大

    公开(公告)号：US20160094161A1

    公开(公告)日：2016-03-31

    申请号：US14503065

    申请日：2014-09-30

    申请人： LuxVue Technology Corporation

    发明人： Stephen P. Bathurst ,  Paul Argus Parks ,  Nile Alexander Light

    IPC分类号： H02N13/00

    CPC分类号： H02N13/00 ,  B81C99/002 ,  H01L21/6833

    摘要： Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes primary spring arms and secondary spring arms extending between a pivot platform and a base of the pivot mount. The secondary spring arms are characterized by a lower stiffness than the primary spring arms, and strain sensing elements are located along the secondary spring arms.

    摘要翻译： 公开了用于将转印头组件与衬底对准的系统和方法。 在一个实施例中，枢轴安装件用于在闭环运动控制系统中产生反馈信号。 在一个实施例中，枢轴支架包括在枢转平台和枢转支架的基部之间延伸的主弹簧臂和次弹簧臂。 次级弹簧臂的特征在于比主弹簧臂更低的刚度，并且应变感测元件沿着次级弹簧臂定位。

    MICRO PICK UP ARRAY PIVOT MOUNT WITH INTEGRATED STRAIN SENSING ELEMENTS
    5.
    发明申请
    MICRO PICK UP ARRAY PIVOT MOUNT WITH INTEGRATED STRAIN SENSING ELEMENTS 有权
    微型拾取阵列装置与集成的应变感应元件

    公开(公告)号：US20150360940A1

    公开(公告)日：2015-12-17

    申请号：US14303483

    申请日：2014-06-12

    申请人： LuxVue Technology Corporation

    发明人： Stephen P. Bathurst ,  Paul Argus Parks ,  Nile Alexander Light

    IPC分类号： B81C99/00

    CPC分类号： B81C99/002 ,  B25J7/00 ,  B25J15/0085 ,  B25J19/02 ,  B81B2203/0163 ,  H01L21/6831 ,  H02N13/00 ,  Y10T74/20006

    摘要： Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

    摘要翻译： 公开了用于将转印头组件与衬底对准的系统和方法。 在一个实施例中，枢轴安装件用于在闭环运动控制系统中产生反馈信号。 在一个实施例中，枢轴支架包括多个弹簧臂，每个弹簧臂包括沿着弹簧臂的轴向长度的开关，使得弹簧臂的一对第一和第二长度紧邻开关 - 背部并且彼此平行。 第一应变传感元件位于第一长度，并且第二应变感测元件位于第二长度。