发明授权
US09099347B2 Three-dimensional semiconductor memory devices and method of fabricating the same 有权
三维半导体存储器件及其制造方法

Three-dimensional semiconductor memory devices and method of fabricating the same
摘要:
Provided are three-dimensional semiconductor memory devices and methods of fabricating the same. The device may include an electrode structure extending in a first direction and including electrodes and insulating patterns which are alternately and repeatedly stacked on a substrate, and vertical active patterns penetrating the electrode structure. At least an uppermost electrode of the electrodes is divided into a plurality of physically isolated segments arranged in the first direction. The segments of the uppermost electrode are electrically connected to each other.
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