Invention Grant
- Patent Title: Method of removing damaged epoxy from electrostatic chuck
- Patent Title (中): 从静电吸盘去除受损环氧树脂的方法
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Application No.: US13624822Application Date: 2012-09-21
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Publication No.: US09105676B2Publication Date: 2015-08-11
- Inventor: Hong Shih , Tuochuan Huang , Yan Fang , Cliff LaCroix , Neal Newton , Rish Chhatre
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martina Penilla Group, LLP
- Main IPC: B08B7/00
- IPC: B08B7/00 ; H01L21/683 ; B08B1/00 ; B08B5/00 ; B08B5/02
Abstract:
A method of removing an epoxy band from an electrostatic chuck includes securing the electrostatic chuck in a servicing fixture, applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, forming a hole in the epoxy band and pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.
Public/Granted literature
- US20140083461A1 METHOD OF REMOVING DAMAGED EPOXY FROM ELECTROSTATIC CHUCK Public/Granted day:2014-03-27
Information query
