Invention Grant
- Patent Title: Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein
- Patent Title (中): 液体处理装置,液体处理方法和存储有程序的计算机可读记录介质
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Application No.: US14466240Application Date: 2014-08-22
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Publication No.: US09108231B2Publication Date: 2015-08-18
- Inventor: Nobuhiro Ogata , Terufumi Wakiyama
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2011-092430 20110418
- Main IPC: B08B3/10
- IPC: B08B3/10 ; B08B3/04 ; B08B3/02 ; H01L21/67

Abstract:
Disclosed is a liquid processing apparatus including first and second cups installed so as to surround a rotation holding unit of a substrate and guide a processing liquid scattered from the rotating substrate downwards. A first driving unit and a second driving unit elevate the first cup and the second cup between a position receiving the processing liquid and the lower position thereof. A controller controls that the first cup and the second cup are ascended at the same time by transferring the driving force of the first driving unit while the first cup or a first elevating member thereof is overlapped with the second cup or a second elevating member thereof from the lower side by setting the ascending speed of the first cup to be higher than the ascending speed of the second cup when the first and second cups are ascended at the same time.
Public/Granted literature
Information query
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