Invention Grant
- Patent Title: Semiconductor devices having balancing capacitor and methods of forming the same
- Patent Title (中): 具有平衡电容器的半导体器件及其形成方法
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Application No.: US14077834Application Date: 2013-11-12
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Publication No.: US09117696B2Publication Date: 2015-08-25
- Inventor: Jong-Un Kim , Yoo-Sang Hwang , Hyun-Woo Chung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeongg-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeongg-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2013-0035315 20130401
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/108 ; G11C11/4097 ; G11C11/4099

Abstract:
A semiconductor memory device includes a substrate including cell block, a balancing block, and a sense block. A plurality of cell bit lines are formed in the cell block of. A plurality of cell plugs are formed adjacent to side surfaces of the bit lines. Cell inner spacers, air spacers, and cell outer spacers are formed between the cell bit lines and the cell plugs. A plurality of balancing bit lines are formed in the balancing block. A plurality of balancing plugs are formed adjacent to side surfaces of the balancing bit lines. Balancing inner spacers and balancing outer spacers are formed between the balancing bit lines and the balancing plugs. The balancing bit lines and at least some of the cell bit lines are connected to the sense block.
Public/Granted literature
- US20140291804A1 SEMICONDUCTOR DEVICES HAVING BALANCING CAPACITOR AND METHODS OF FORMING THE SAME Public/Granted day:2014-10-02
Information query
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