Invention Grant
- Patent Title: Heater block and heat treatment apparatus having the same
- Patent Title (中): 加热器组件和热处理设备具有相同的功能
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Application No.: US13791848Application Date: 2013-03-08
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Publication No.: US09117858B2Publication Date: 2015-08-25
- Inventor: Il Hwan Lim , Jang Woo Shim , Chul Soo Kim , Seung Ae Choi
- Applicant: AP SYSTEMS INC.
- Applicant Address: KR
- Assignee: AP SYSTEMS INC.
- Current Assignee: AP SYSTEMS INC.
- Current Assignee Address: KR
- Priority: KR10-2012-0024566 20120309
- Main IPC: F26B3/30
- IPC: F26B3/30 ; F26B19/00 ; F24C7/00 ; H01L21/67

Abstract:
A heater block according to the present invention comprises a light-emitting lamp; a concave reflecting member that is placed opposite the lamp and has a concave reflecting surface at one surface faced with the lamp; a lens module that is inserted into the concave reflecting member and has at least one lens; and a flat reflecting member that is placed opposite the lens module. According to embodiments of the present invention, light emitted from the lamp is reflected by the concave reflecting member. Then, light and heat are collected from the reflected light by the flat reflecting member and the lens module and are irradiated on a substrate. That is, light having energy greater than a conventional manner is irradiated on the substrate to enhance the instant heating temperature and temperature increasing rate of substrate and to increase a heat-focusing area. Therefore, it has an advantage that the productivity of semiconductor or display device manufacture that requires a rapid thermal process is improved.
Public/Granted literature
- US20130287376A1 HEATER BLOCK AND HEAT TREATMENT APPARATUS HAVING THE SAME Public/Granted day:2013-10-31
Information query
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