Invention Grant
US09123716B2 Method for bonding two silicon substrates, and a correspondeing system of two silicon substrates
有权
用于接合两个硅衬底的方法,以及两个硅衬底的对应系统
- Patent Title: Method for bonding two silicon substrates, and a correspondeing system of two silicon substrates
- Patent Title (中): 用于接合两个硅衬底的方法,以及两个硅衬底的对应系统
-
Application No.: US13719799Application Date: 2012-12-19
-
Publication No.: US09123716B2Publication Date: 2015-09-01
- Inventor: Julian Gonska , Heribert Weber , Jens Frey , Timo Schary , Thomas Mayer
- Applicant: Julian Gonska , Heribert Weber , Jens Frey , Timo Schary , Thomas Mayer
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011089569 20111222
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/48 ; H01L21/50 ; H01L23/488 ; H01L21/18 ; B81C1/00 ; H01L23/00

Abstract:
A method for bonding two silicon substrates and a corresponding system of two silicon substrates. The method includes: providing first and second silicon substrates; depositing a first bonding layer of pure aluminum or of aluminum-copper having a copper component between 0.1 and 5% on a first bonding surface of the first silicon substrate; depositing a second bonding layer of germanium above the first bonding surface or above a second bonding surface of the second silicon substrate; subsequently joining the first and second silicon substrates, so that the first and the second bonding surfaces lie opposite each other; and implementing a thermal treatment step to form an eutectic bonding layer of aluminum-germanium or containing aluminum-germanium as the main component, between the first silicon substrate and the second silicon substrate, spikes which contain aluminum as a minimum and extend into the first silicon substrate, forming at least on the first bonding surface.
Public/Granted literature
- US20130161820A1 METHOD FOR BONDING TWO SILICON SUBSTRATES, AND A CORRESPONDEING SYSTEM OF TWO SILICON SUBSTRATES Public/Granted day:2013-06-27
Information query
IPC分类: