Invention Grant
- Patent Title: Bonding alignment tool and method
- Patent Title (中): 粘接对准工具及方法
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Application No.: US13267336Application Date: 2011-10-06
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Publication No.: US09123754B2Publication Date: 2015-09-01
- Inventor: Yun-Tai Shih , Kuan-Ming Pan , Jeng-Hao Lin , I-Shi Wang , Jui-Mu Cho , Ching-Hou Su , Chyi-Tsong Ni , Wun-Kai Tsai
- Applicant: Yun-Tai Shih , Kuan-Ming Pan , Jeng-Hao Lin , I-Shi Wang , Jui-Mu Cho , Ching-Hou Su , Chyi-Tsong Ni , Wun-Kai Tsai
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: B23Q17/00
- IPC: B23Q17/00 ; H01L21/67 ; H01L21/68

Abstract:
An apparatus is disclosed for detecting flag velocity during a eutectic process for bonding two wafers. The apparatus includes a plurality of sensors for detecting a time and/or velocity of a plurality of flags within a flag-out mechanism. The apparatus also includes one or more displays displaying time durations associated with the movement of the flags during the bonding process. Also disclosed is a method of aligning wafers in a eutectic bonding process. The method includes determining one or more time durations associated with the movement of the flags in the plurality of flags. The method also includes determining if a misalignment has occurred based on the one or more time durations associated with the movement of the flags.
Public/Granted literature
- US20130086786A1 BONDING ALIGNMENT TOOL AND METHOD Public/Granted day:2013-04-11
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