发明授权
- 专利标题: Three-dimensional semiconductor memory devices having double cross point array and methods of fabricating the same
- 专利标题(中): 具有双交叉点阵列的三维半导体存储器件及其制造方法
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申请号: US13494236申请日: 2012-06-12
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公开(公告)号: US09129830B2公开(公告)日: 2015-09-08
- 发明人: Ingyu Baek , Sunjung Kim
- 申请人: Ingyu Baek , Sunjung Kim
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG Electronics Co., Ltd.
- 当前专利权人: SAMSUNG Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Ellsworth IP Group PLLC
- 优先权: KR10-2011-0056994 20110613
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L27/10 ; H01L27/22 ; H01L27/24 ; G11C13/00 ; H01L45/00
摘要:
Three-dimensional semiconductor memory devices and methods of fabricating the same. The device may include first, second and third conductive lines disposed at different vertical levels to define two intersections, and two memory cells disposed at the two intersections, respectively. The first and second conductive lines may extend parallel to each other, and the third conductive line may extend to cross the first and second conductive lines. The first and second conductive lines can be alternatingly arranged along the length of third conductive line in vertical sectional view, and the third conductive line may be spaced vertically apart from the first and second conductive lines.
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