发明授权
- 专利标题: Closed-loop control for improved polishing pad profiles
- 专利标题(中): 改善抛光垫轮廓的闭环控制
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申请号: US13087180申请日: 2011-04-14
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公开(公告)号: US09138860B2公开(公告)日: 2015-09-22
- 发明人: Sivakumar Dhandapani , Jun Qian , Christopher D. Cocca , Jason G. Fung , Shou-Sung Chang , Charles C. Garretson , Gregory E. Menk , Stan D. Tsai
- 申请人: Sivakumar Dhandapani , Jun Qian , Christopher D. Cocca , Jason G. Fung , Shou-Sung Chang , Charles C. Garretson , Gregory E. Menk , Stan D. Tsai
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: B24B53/02
- IPC分类号: B24B53/02 ; B24B53/017 ; B24B37/04
摘要:
Embodiments described herein use closed-loop control (CLC) of conditioning sweep to enable uniform groove depth removal across the pad, throughout pad life. A sensor integrated into the conditioning arm enables the pad stack thickness to be monitored in-situ and in real time. Feedback from the thickness sensor is used to modify pad conditioner dwell times across the pad surface, correcting for drifts in the pad profile that may arise as the pad and disk age. Pad profile CLC enables uniform reduction in groove depth with continued conditioning, providing longer consumables lifetimes and reduced operating costs.
公开/授权文献
- US20110256812A1 CLOSED-LOOP CONTROL FOR IMPROVED POLISHING PAD PROFILES 公开/授权日:2011-10-20
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