Invention Grant
US09147730B2 Methods of forming fins for FinFET semiconductor devices and selectively removing some of the fins by performing a cyclical fin cutting process
有权
形成FinFET半导体器件的鳍片的方法,并通过执行循环鳍片切割工艺选择性地去除一些鳍片
- Patent Title: Methods of forming fins for FinFET semiconductor devices and selectively removing some of the fins by performing a cyclical fin cutting process
- Patent Title (中): 形成FinFET半导体器件的鳍片的方法,并通过执行循环鳍片切割工艺选择性地去除一些鳍片
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Application No.: US14195344Application Date: 2014-03-03
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Publication No.: US09147730B2Publication Date: 2015-09-29
- Inventor: Ruilong Xie , Andreas Knorr , Ajey Poovannummoottil Jacob , Michael Hargrove
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L29/06 ; H01L21/306 ; H01L21/311 ; H01L21/308

Abstract:
One illustrative method disclosed herein includes forming a plurality of initial fins in a substrate, wherein at least one of the initial fins is a to-be-removed fin, forming a material adjacent the initial fins, forming a fin removal masking layer above the plurality of initial fins, removing a desired portion of the at least one to-be-removed fin by: (a) performing a recess etching process on the material to remove a portion, but not all, of the material positioned adjacent the sidewalls of the at least one to-be-removed fin, (b) after performing the recess etching process, performing a fin recess etching process to remove a portion, but not all, of the at least one to be removed fin and (c) repeating steps (a) and (b) until the desired amount of the at least one to-be-removed fin is removed.
Public/Granted literature
Information query
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