- 专利标题: Radiation-sensitive resin composition, method for forming resist pattern, acid generating agent and compound
-
申请号: US13627208申请日: 2012-09-26
-
公开(公告)号: US09152044B2公开(公告)日: 2015-10-06
- 发明人: Yusuke Asano
- 申请人: JSR CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2011-210002 20110926; JP2012-196209 20120906
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C309/19 ; C07C309/12 ; C07C381/12 ; G03F7/20 ; G03F7/039 ; G03F7/11 ; C07C309/07 ; C07C309/16 ; C07C309/17 ; C07C309/65 ; C07C317/12 ; C07D295/185
摘要:
A radiation-sensitive resin composition includes an acid generating agent to generate a compound represented by a following formula (1) by irradiation with a radioactive ray. In the formula (1), R1 represents a monovalent organic group having 1 to 20 carbon atoms. R2 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. The compound represented by the formula (1) is preferably a compound represented by a following formula (1-1). In the formula (1-1), R2 is as defined in the above formula (1). X represents an electron attractive group. R3 represents a monovalent organic group having 1 to 20 carbon atoms.
公开/授权文献
信息查询
IPC分类: