Invention Grant
- Patent Title: Photoresist compositions and methods of forming photolithographic patterns
- Patent Title (中): 光刻胶组合物和形成光刻图案的方法
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Application No.: US13956100Application Date: 2013-07-31
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Publication No.: US09158198B2Publication Date: 2015-10-13
- Inventor: Jong Keun Park , Christopher Nam Lee , Cecily Andes , Deyan Wang
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agent Jonathan D. Baskin
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/20 ; G03F7/038 ; G03F7/039

Abstract:
Provided are photoresist compositions useful in forming photolithographic patterns by a negative tone development process. Also provided are methods of forming photolithographic patterns by a negative tone development process and substrates coated with the photoresist compositions. The photoresist compositions include one or more polymer additive that contains a basic moiety and which is substantially non-miscible with a resin component of the resist. The compositions, methods and coated substrates find particular applicability in the manufacture of semiconductor devices.
Public/Granted literature
- US20140038102A1 PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS Public/Granted day:2014-02-06
Information query
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