Invention Grant
US09159555B2 Multi charged particle beam writing apparatus and multi charged particle beam writing method 有权
多带电粒子束写入装置和多带电粒子束写入方法

Multi charged particle beam writing apparatus and multi charged particle beam writing method
Abstract:
A multi charged particle beam writing apparatus includes a unit to calculate a predetermined function expression by a correction coefficient that corrects an open area of each opening for forming a beam group, wherein the predetermined function expression minimizes a sum of squared values of all the beam groups, where each of the squared values is calculated by squaring a difference between a current value measured of the beam group and a sum of products for the beam group, where each of the products is obtained by multiplying a corrected open area by the predetermined function expression; a unit to calculate the correction coefficient that corrects the open area by using the predetermined function expression and the current value of the beam, for each beam; and a unit to calculate a current density of each of the multiple beams by the predetermined function expression.
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