发明授权
US09159568B2 Method for fabricating memory cells having split charge storage nodes
有权
用于制造具有分离电荷存储节点的存储单元的方法
- 专利标题: Method for fabricating memory cells having split charge storage nodes
- 专利标题(中): 用于制造具有分离电荷存储节点的存储单元的方法
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申请号: US11639666申请日: 2006-12-15
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公开(公告)号: US09159568B2公开(公告)日: 2015-10-13
- 发明人: Chungho Lee , Wei Zheng , Chi Chang , Unsoon Kim , Hiroyuki Kinoshita
- 申请人: Chungho Lee , Wei Zheng , Chi Chang , Unsoon Kim , Hiroyuki Kinoshita
- 申请人地址: US CA San Jose
- 专利权人: Cypress Semiconductor Corporation
- 当前专利权人: Cypress Semiconductor Corporation
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L29/66 ; H01L29/10 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/792
摘要:
Memory cells having split charge storage nodes and methods for fabricating memory cells having split charge storage nodes are disclosed. A disclosed method includes forming a first trench and an adjacent second trench in a semiconductor substrate, the first trench and the second trench each defining a first sidewall and a second sidewall respectively and forming a first source/drain region in the substrate and a second source/drain region in the substrate, where the first source/drain region and the second source/drain region are formed substantially under the first trench and the second trench in the semiconductor substrate respectively. Moreover, a method includes forming a bit line punch through barrier in the substrate between the first source/drain region and the second source drain region and forming a first storage element on the first sidewall of the first trench and a second storage element on the second sidewall of the second element. A word line is formed in contact with the first storage element and the second storage element.
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