Invention Grant
US09159587B2 Glass wafers for semiconductors fabrication processes and methods of making same 有权
半导体制造工艺的玻璃晶片及其制造方法

Glass wafers for semiconductors fabrication processes and methods of making same
Abstract:
The present disclosure is directed to the use of glass wafers as carriers, interposers, or in other selected applications in which electronic circuitry or operative elements, such as transistors, are formed in the creation of electronic devices. The glass wafers generally include a glass having a coefficient of thermal expansion equal to or substantially equal to a coefficient of thermal expansion of semiconductor silicon, an indexing feature, and a coating on at least a portion of one face of the glass.
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