Invention Grant
- Patent Title: Glass wafers for semiconductors fabrication processes and methods of making same
- Patent Title (中): 半导体制造工艺的玻璃晶片及其制造方法
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Application No.: US14488943Application Date: 2014-09-17
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Publication No.: US09159587B2Publication Date: 2015-10-13
- Inventor: Joseph Eugene Canale , Jeffrey Stapleton King , Gary Richard Trott
- Applicant: CORNING INCORPORATED
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent John T. Haran
- Main IPC: C03C17/00
- IPC: C03C17/00 ; H01L21/58 ; H01L21/50 ; H01L21/02

Abstract:
The present disclosure is directed to the use of glass wafers as carriers, interposers, or in other selected applications in which electronic circuitry or operative elements, such as transistors, are formed in the creation of electronic devices. The glass wafers generally include a glass having a coefficient of thermal expansion equal to or substantially equal to a coefficient of thermal expansion of semiconductor silicon, an indexing feature, and a coating on at least a portion of one face of the glass.
Public/Granted literature
- US20150099330A1 Glass Wafers for Semiconductors Fabrication Processes and Methods of Making Same Public/Granted day:2015-04-09
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