Invention Grant
US09159646B2 Apparatus and method to monitor die edge defects 有权
监测管芯边缘缺陷的装置和方法

Apparatus and method to monitor die edge defects
Abstract:
Described is an apparatus comprising: an input pad; an output pad; a wire, coupled to the input pad and the output pad, the wire positioned at a periphery of a semiconductor die, the wire extending substantially along a perimeter of the semiconductor die; and one or more diodes, coupled at various sections of the wire, and positioned along the perimeter of the semiconductor die and surrounding the semiconductor die.
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