Invention Grant
US09163934B2 Gap measurement device 有权
间隙测量装置

Gap measurement device
Abstract:
A gap measurement device 1 comprises a light source 5 for projecting light on a gap 3 to be measured, a lens optical system 6 for focusing on an imaging surface 7 a gap image 3A from light transmitted through the gap 3, and a light-receiving element 9 for receiving light of the gap image 3A formed on the imaging surface 7 of the lens optical system 6. A holed mask 8 provided with a light-transmitting hole 8a having a prescribed aperture size is arranged on the imaging surface 7, and the light-receiving element 9 receives the light of the gap image 3A via the hole 8a. A gap size at a point to be measured in an extended gap 3 can be measured by forming an image of the gap with the lens optical system 6 and placing the hole 8a of the holed mask 8 on the point to be measured on the imaging surface 7 of the lens optical system 6.
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