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公开(公告)号：US09163934B2
公开(公告)日：2015-10-20
申请号：US14279313
申请日：2014-05-15
CPC分类号： G01B11/14 , G01B11/08 , G01B11/105
摘要： A gap measurement device 1 comprises a light source 5 for projecting light on a gap 3 to be measured, a lens optical system 6 for focusing on an imaging surface 7 a gap image 3A from light transmitted through the gap 3, and a light-receiving element 9 for receiving light of the gap image 3A formed on the imaging surface 7 of the lens optical system 6. A holed mask 8 provided with a light-transmitting hole 8a having a prescribed aperture size is arranged on the imaging surface 7, and the light-receiving element 9 receives the light of the gap image 3A via the hole 8a. A gap size at a point to be measured in an extended gap 3 can be measured by forming an image of the gap with the lens optical system 6 and placing the hole 8a of the holed mask 8 on the point to be measured on the imaging surface 7 of the lens optical system 6.
摘要翻译： 间隙测量装置1包括用于将光投射在待测量间隙3上的光源5，用于将透过间隙3的光聚焦在成像表面7上的透镜光学系统6和光接收 元件9，用于接收形成在透镜光学系统6的成像表面7上的间隙图像3A的光。具有规定孔径尺寸的透光孔8a的孔掩模8布置在成像表面7上， 光接收元件9经由孔8a接收间隙图像3A的光。 可以通过与透镜光学系统6形成间隙的图像并将孔眼8的孔8a放置在成像面上的待测点上来测量在延伸间隙3中要测量的点处的间隙尺寸 7透镜光学系统6。
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公开(公告)号：US07502127B2
公开(公告)日：2009-03-10
申请号：US11588271
申请日：2006-10-27
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
CPC分类号： G03F7/70758 , G01D5/28 , G01D5/38 , G03F7/70775
摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
摘要翻译： 根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。 传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。 光源向参考光栅发射光。 光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。 检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。 检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。
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公开(公告)号：US07257902B2
公开(公告)日：2007-08-21
申请号：US11522400
申请日：2006-09-18
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
IPC分类号： G01D21/00
CPC分类号： G03F7/70775 , G03F7/70716
摘要： This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.
摘要翻译： 本发明涉及一种使用平面电机在X-Y方向和旋转方向上高精度地移动的平台装置。 本发明的目的在于减小舞台装置的尺寸并且准确地测量舞台到底座的位置。 舞台装置包括在基座的整个平面上具有刻度部分的刻度单元，以及设置在可移动台部的底面上的三个二维角度传感器。 刻度单元和二维角度传感器形成表面编码。 可动平台部分的位置由表面编码器测量。
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公开(公告)号：US5978743A
公开(公告)日：1999-11-02
申请号：US84221
申请日：1998-05-26
申请人： Satoshi Kiyono
发明人： Satoshi Kiyono
摘要： The method of self-calibrating for a sensor without using an additional device by using data sampling, an approximate value of linear errors obtained by performing the numerical integration of approximate values of a linear-error derivative, correcting the approximate value of the input value at each sampling point, and repeating the processing for correcting the approximate value of the linear error by necessary times.
摘要翻译： 通过使用数据采样对传感器进行自校准的方法，不使用附加设备，通过执行线性误差导数的近似值的数值积分获得的线性误差的近似值，将输入值的近似值修正为 每个采样点，并且重复用于通过必要时间校正线性误差的近似值的处理。
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公开(公告)号：US20140347679A1
公开(公告)日：2014-11-27
申请号：US14279313
申请日：2014-05-15
IPC分类号： G01B11/14
CPC分类号： G01B11/14 , G01B11/08 , G01B11/105
摘要： A gap measurement device 1 comprises a light source 5 for projecting light on a gap 3 to be measured, a lens optical system 6 for focusing on an imaging surface 7 a gap image 3A from light transmitted through the gap 3, and a light-receiving element 9 for receiving light of the gap image 3A formed on the imaging surface 7 of the lens optical system 6. A holed mask 8 provided with a light-transmitting hole 8a having a prescribed aperture size is arranged on the imaging surface 7, and the light-receiving element 9 receives the light of the gap image 3A via the hole 8a. A gap size at a point to be measured in an extended gap 3 can be measured by forming an image of the gap with the lens optical system 6 and placing the hole 8a of the holed mask 8 on the point to be measured on the imaging surface 7 of the lens optical system 6.
摘要翻译： 间隙测量装置1包括用于将光投射在待测量间隙3上的光源5，用于将透过间隙3的光聚焦在成像表面7上的透镜光学系统6和光接收 元件9，用于接收形成在透镜光学系统6的成像表面7上的间隙图像3A的光。具有规定孔径尺寸的透光孔8a的孔掩模8布置在成像表面7上， 光接收元件9经由孔8a接收间隙图像3A的光。 可以通过与透镜光学系统6形成间隙的图像并将孔眼8的孔8a放置在成像面上的待测点上来测量在延伸间隙3中要测量的点处的间隙尺寸 7透镜光学系统6。
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公开(公告)号：US20070041024A1
公开(公告)日：2007-02-22
申请号：US11588271
申请日：2006-10-27
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
IPC分类号： G01B11/14
CPC分类号： G03F7/70758 , G01D5/28 , G01D5/38 , G03F7/70775
摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
摘要翻译： 根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。 传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。 光源向参考光栅发射光。 光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。 检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。 检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。
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公开(公告)号：US20050147198A1
公开(公告)日：2005-07-07
申请号：US11030226
申请日：2005-01-06
申请人： Satoshi Kiyono
发明人： Satoshi Kiyono
CPC分类号： G06T11/005 , A61B6/032 , A61B6/463 , A61B6/469 , G06T2211/428 , Y10S378/901
摘要： A radiation tomographic imaging apparatus includes a scanning device for scanning a predefined region in a subject, a prescribing device for prescribing beforehand a position at which an image of said subject is to be produced at a higher priority in the scan region in said subject, and a reconstructing device for sequentially reconstructing an image of said subject from projection data obtained by said scanning device, wherein once projection data at said prescribed higher-priority position has been obtained from said scanning device, said reconstructing device reconstructs an image at said higher-priority position at a higher priority.
摘要翻译： 放射线断层图像摄像装置包括扫描被检体内的预定区域的扫描装置，预先在所述被检体的扫描区域中以较高的优先级预先制定要产生所述被检体的图像的位置的处方装置， 一种重建装置，用于从由所述扫描装置获得的投影数据顺序地重构所述被摄体的图像，其中，一旦已经从所述扫描装置获得了在所述规定的较高优先级位置处的投影数据，则所述重建装置以更高优先级重建图像 立场优先。
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公开(公告)号：US20070035267A1
公开(公告)日：2007-02-15
申请号：US11522400
申请日：2006-09-18
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
IPC分类号： B64C17/06
CPC分类号： G03F7/70775 , G03F7/70716
摘要： This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.
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9.发明授权Method and apparatus for angle measurement based on the internal reflection effect 失效基于内部反射效应的角度测量方法和装置
公开(公告)号：US5220397A
公开(公告)日：1993-06-15
申请号：US857380
申请日：1992-03-25
申请人： Peisen Huang , Satoshi Kiyono
发明人： Peisen Huang , Satoshi Kiyono
IPC分类号： G01B11/26
CPC分类号： G01B11/26
摘要： A new method of angle measurement is based on the internal reflection effect at an air/glass boundary. The method uses a differential detection scheme to largely reduce the inherent non-linearity of the reflectance versus the angle of incidence in internal reflection. With non-linearity reduced, the displacement of the angle of incidence can be determined accurately by measuring the reflectance. The resolution and measurement range are determined by the initial angle of incidence, the polarization state of light, and the number of reflections. Compared with interferometers and autocollimators, this method has the advantage of a simple sensor design for applications ranging from very wide measurement range to extremely high resolution. Apparatus for accomplishing the method comprises a beamsplitter, a pair of critical angle prisms and a pair of photodiodes. Each photodiode measures change in reflectance and with the application of suitable computation means produces an angle measurement of the beam incident to the beamsplitter.
摘要翻译： 一种新的角度测量方法是基于空气/玻璃边界的内部反射效应。 该方法使用差分检测方案大大降低反射率与内部反射中入射角的固有非线性关系。 随着非线性的降低，可以通过测量反射率来准确地确定入射角的位移。 分辨率和测量范围由初始入射角，光的偏振状态和反射次数决定。 与干涉仪和自动准直仪相比，该方法具有传感器设计简单的优点，适用范围从非常宽的测量范围到极高的分辨率。 用于实现该方法的装置包括分束器，一对临界角棱镜和一对光电二极管。 每个光电二极管测量反射率的变化，并且适用的计算装置的应用产生入射到分束器的光束的角度测量。
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10.发明授权Self-calibration method for angle detector, angle detector, circumferential scale calibration device, and angle detector calibration device 有权角度检测器，角度检测器，圆周刻度校准装置和角度检测器校准装置的自校准方法公开(公告)号：US09046384B2
公开(公告)日：2015-06-02
申请号：US13633071
申请日：2012-10-01
发明人： Hiroshi Yamazaki , Hiroki Hanaoka , Satoshi Kiyono
CPC分类号： G01D5/24452
摘要： In a self-calibration method of an angle detector, an angle interval between first and second scale reader heads are set, so that a single rotation is not equally divided into an integer number of portions by a value of the angle interval and that a plurality of rotations N are equally divided into M equal portions by the value of the angle interval. Readings by the scale reader heads during N rotations of the divided circle are obtained at a pre-set data sampling interval. From differences in readings by these scale reader heads, data of the sequential two-point method relating to an angle scale error of the divided circle are obtained at the data sampling interval. The scale error of the divided circle at the data sampling interval is calculated by synthesizing the data using the fact that an average of the data for the rotations N reaches approximately zero.
摘要翻译： 在角度检测器的自校准方法中，设置第一和第二刻度读取头之间的角度间隔，使得通过角度间隔的值将单个旋转不等分成整数个部分，并且多个 的旋转N通过角度间隔的值被等分成M等分。 在预先设定的数据采样间隔处获得在划分圆的N个旋转期间通过刻度尺读取头的读数。 由于这些刻度读取头的读数差异，在数据采样间隔获得与分割圆的角度刻度误差有关的连续两点方法的数据。 通过使用旋转数据N的平均值近似为零的事实合成数据来计算数据采样间隔处的分割圆的比例误差。
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