发明授权
- 专利标题: Optics symmetrization for metrology
- 专利标题(中): 计量学的光学对称性
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申请号: US13188623申请日: 2011-07-22
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公开(公告)号: US09164397B2公开(公告)日: 2015-10-20
- 发明人: Amnon Manassen , Daniel Kandel , Moshe Baruch , Joel L. Seligson , Alexander Svizher , Guy Cohen , Efraim Rotem , Ohad Bachar , Daria Negri , Noam Sapiens
- 申请人: Amnon Manassen , Daniel Kandel , Moshe Baruch , Joel L. Seligson , Alexander Svizher , Guy Cohen , Efraim Rotem , Ohad Bachar , Daria Negri , Noam Sapiens
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G03F7/20 ; G01N21/55
摘要:
The present invention includes an illumination source, at least one illumination symmetrization module (ISM) configured to symmetrize at least a portion of light emanating from the illumination source, a first beam splitter configured to direct a first portion of light processed by the ISM along an object path to a surface of one or more specimens and a second portion of light processed by the ISM along a reference path, and a detector disposed along a primary optical axis, wherein the detector is configured to collect a portion of light reflected from the surface of the one or more specimens.
公开/授权文献
- US20120033226A1 OPTICS SYMMETRIZATION FOR METROLOGY 公开/授权日:2012-02-09
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