Invention Grant
- Patent Title: Electrolytic copper plating solution and method of electrolytic copper plating
- Patent Title (中): 电解铜电镀液及电解镀铜方法
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Application No.: US13907433Application Date: 2013-05-31
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Publication No.: US09169576B2Publication Date: 2015-10-27
- Inventor: Mutsuko Saito , Makoto Sakai , Yoko Mizuno , Toshiyuki Morinaga , Shinjiro Hayashi
- Applicant: Rohm and Haas Electronic Materials LLC
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Priority: JP2012-125008 20120531
- Main IPC: C25D3/38
- IPC: C25D3/38 ; C25D3/40 ; C23C18/40 ; C25D5/02

Abstract:
An electrolytic copper plating solution is provided which has an excellent via filling ability without using formaldehyde, which is harmful to the environment. An electrolytic copper plating solution which contains compounds which have an —X—S—Y— structure wherein X and Y are individually atoms selected from a group comprising hydrogen, carbon, sulfur, nitrogen, and oxygen atoms and X and Y can be the same only when they are carbon atoms and specific nitrogen-containing compounds. Good filled vias can be made without causing a worsening of the exterior appearance of the plating by using this electrolytic copper plating solution.
Public/Granted literature
- US20130319867A1 ELECTROLYTIC COPPER PLATING SOLUTION AND METHOD OF ELECTROLYTIC COPPER PLATING Public/Granted day:2013-12-05
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