Electrolytic copper plating solution and method of electrolytic copper plating
    6.
    发明授权
    Electrolytic copper plating solution and method of electrolytic copper plating 有权
    电解铜电镀液及电解镀铜方法

    公开(公告)号:US09169576B2

    公开(公告)日:2015-10-27

    申请号:US13907433

    申请日:2013-05-31

    CPC classification number: C25D3/38 C25D5/02

    Abstract: An electrolytic copper plating solution is provided which has an excellent via filling ability without using formaldehyde, which is harmful to the environment. An electrolytic copper plating solution which contains compounds which have an —X—S—Y— structure wherein X and Y are individually atoms selected from a group comprising hydrogen, carbon, sulfur, nitrogen, and oxygen atoms and X and Y can be the same only when they are carbon atoms and specific nitrogen-containing compounds. Good filled vias can be made without causing a worsening of the exterior appearance of the plating by using this electrolytic copper plating solution.

    Abstract translation: 提供一种电解镀铜溶液,其具有优异的通孔填充能力,而不使用对环境有害的甲醛。 含有具有-X-S-Y-结构的化合物的电解铜电镀溶液,其中X和Y分别是选自氢,碳,硫,氮和氧原子的原子,X和Y可以相同 只有当它们是碳原子和特定的含氮化合物时。 可以通过使用该电解铜电镀溶液,而不会导致电镀外观恶化而形成良好的填充通孔。

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