Invention Grant
- Patent Title: Wafer inspection using free-form care areas
- Patent Title (中): 晶圆检查使用自由形式护理区域
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Application No.: US14168011Application Date: 2014-01-30
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Publication No.: US09171364B2Publication Date: 2015-10-27
- Inventor: Kenong Wu , Tao Luo , Lisheng Gao , Eugene Shifrin , Aravindh Balaji
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00

Abstract:
Methods and systems for detecting defects on a wafer are provided. One method includes determining characteristics of care areas for a wafer based on wafer patterns. Determining the characteristics includes determining locations of care areas, identifying at least one pattern of interest (POI) in the wafer patterns for each of the care areas, allowing any of the care areas to have a free-form shape, allowing the care areas to be larger than frame images and selecting two or more POIs for at least one of the care areas. The method also includes searching for POIs in images generated for the wafer using an inspection system. In addition, the method includes detecting defects on the wafer by determining positions of the care areas in the images and applying one or more defect detection methods to the images based on the positions of the care areas in the images.
Public/Granted literature
- US20140376802A1 Wafer Inspection Using Free-Form Care Areas Public/Granted day:2014-12-25
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