发明授权
US09175808B2 System and method for decreasing scrubber exhaust from gas delivery panels
有权
从气体输送板减少洗涤器排气的系统和方法
- 专利标题: System and method for decreasing scrubber exhaust from gas delivery panels
- 专利标题(中): 从气体输送板减少洗涤器排气的系统和方法
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申请号: US13220890申请日: 2011-08-30
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公开(公告)号: US09175808B2公开(公告)日: 2015-11-03
- 发明人: Mark Taskar , Iqbal Shareef
- 申请人: Mark Taskar , Iqbal Shareef
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: B60B15/04
- IPC分类号: B60B15/04 ; F17D1/00 ; B08B15/00 ; B08B15/04
摘要:
A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.
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