发明授权
US09177688B2 Carbon nanotube-graphene hybrid transparent conductor and field effect transistor
有权
碳纳米管 - 石墨烯混合透明导体和场效应晶体管
- 专利标题： Carbon nanotube-graphene hybrid transparent conductor and field effect transistor
- 专利标题（中）： 碳纳米管 - 石墨烯混合透明导体和场效应晶体管
-
申请号： US13301943申请日： 2011-11-22
-
公开(公告)号： US09177688B2公开(公告)日： 2015-11-03
- 发明人: Ageeth A. Bol , Bhupesh Chandra , Amal Kasry , Ahmed Maarouf , Glenn J. Martyna , George S. Tulevski
- 申请人： Ageeth A. Bol , Bhupesh Chandra , Amal Kasry , Ahmed Maarouf , Glenn J. Martyna , George S. Tulevski
- 申请人地址： US NY Armonk EG Cairo
- 专利权人： International Business Machines Corporation,Egypt Nanotechnology Center
- 当前专利权人： International Business Machines Corporation,Egypt Nanotechnology Center
- 当前专利权人地址： US NY Armonk EG Cairo
- 代理机构： Ryan, Mason & Lewis, LLP
- 主分类号： B32B9/00
- IPC分类号： B32B9/00 ; H01B1/04 ; C01B31/02 ; C01B31/04 ; C23C16/26 ; H01L51/10 ; H01L29/16 ; H01L29/778 ; H01L29/66 ; H01L29/786 ; B82Y10/00 ; B82Y30/00 ; B82Y40/00 ; H01L51/00 ; H01L51/05 ; H01L29/06
摘要：
A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. The method includes depositing nanotube film over a substrate to produce a layer of nanotube film, removing impurities from a surface of the layer of nanotube film not contacting the substrate to produce a cleaned layer of nanotube film, depositing a layer of graphene over the cleaned layer of nanotube film to produce a nanotube-graphene hybrid film, and removing impurities from a surface of the nanotube-graphene hybrid film to produce a cleaned nanotube-graphene hybrid film, wherein the hybrid film has improved electrical performance. Another method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate.
公开/授权文献
信息查询
