- Patent Title: Semiconductor integrated circuit and method of producing the same
-
Application No.: US14600554Application Date: 2015-01-20
-
Publication No.: US09184171B2Publication Date: 2015-11-10
- Inventor: Tetsuo Endoh , Seo Moon-Sik
- Applicant: TOHOKU UNIVERSITY
- Applicant Address: JP Sendai-shi
- Assignee: TOHOKU UNIVERSITY
- Current Assignee: TOHOKU UNIVERSITY
- Current Assignee Address: JP Sendai-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2010-112705 20100514
- Main IPC: H01L31/119
- IPC: H01L31/119 ; H01L27/115 ; H01L29/423

Abstract:
Provided is a semiconductor integrated circuit that uses a novel vertical MOS transistor that is free of interference between cells, that enables the short-channel effect to be minimized, that does not have hot electron injection, and that does not require the formation of shallow junction. Also provided is a method of producing the semiconductor integrated circuit. A memory cell 1 in the semiconductor integrated circuit is provided with: a semiconductor pillar 2 that serves as a channel; a floating gate 5 that circumferentially covers the semiconductor pillar 2 via a tunnel insulation layer 6 on the outer circumference of the semiconductor pillar 2; and a control gate 4 that circumferentially covers the semiconductor pillar via an insulating layer 8 on the outer circumference of the semiconductor pillar 2, and that circumferentially covers the floating gate 5 via an insulating layer 7 on the outer circumference of the floating gate.
Public/Granted literature
- US20150194436A1 SEMICONDUCTOR INTEGRATED CIRCUIT AND METHOD OF PRODUCING THE SAME Public/Granted day:2015-07-09
Information query
IPC分类: