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US09184218B2 Semiconductor memory device having three-dimensional cross point array 有权
具有三维交叉点阵列的半导体存储器件

Semiconductor memory device having three-dimensional cross point array
Abstract:
A semiconductor memory device includes pillars extending upright on a substrate in a direction perpendicular to the substrate, a stack disposed on the substrate and constituted by a first interlayer insulating layer, a first conductive layer, a second interlayer insulating layer, and a second conductive layer, a variable resistance layer interposed between the pillars and the first conductive layer, and an insulating layer interposed between the first pillars and the second conductive layer.
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