发明授权
US09186696B2 Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate
有权
涂覆装置包括用于向基材施加液体的室，传感器，去除单元和控制装置
- 专利标题： Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate
- 专利标题（中）： 涂覆装置包括用于向基材施加液体的室，传感器，去除单元和控制装置
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申请号： US12874984申请日： 2010-09-02
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公开(公告)号： US09186696B2公开(公告)日： 2015-11-17
- 发明人: Hidenori Miyamoto , Kenji Maruyama , Tadahiko Hirakawa , Koichi Misumi
- 申请人： Hidenori Miyamoto , Kenji Maruyama , Tadahiko Hirakawa , Koichi Misumi
- 申请人地址： JP Kawasaki-shi
- 专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址： JP Kawasaki-shi
- 代理机构： Knobbe Martens Olson & Bear LLP
- 优先权： JP2009-207140 20090908
- 主分类号： B05C11/00
- IPC分类号： B05C11/00 ; B05C11/10 ; B05C5/00 ; C23C16/52 ; H01L21/67 ; H01L21/677 ; H01L31/0216 ; H01L31/032 ; H01L31/18 ; B41J2/045
摘要：
A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate, a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the substrate is transported, and a removal unit which removes the liquid material from the inside of the chamber when at least one of oxygen concentration and humidity inside the chamber exceeds a threshold value.
公开/授权文献
- US20110059245A1 COATING APPARATUS AND COATING METHOD 公开/授权日：2011-03-10
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