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公开(公告)号：US09299874B2
公开(公告)日：2016-03-29
申请号：US13878964
申请日：2011-10-12
IPC分类号： H01L31/18 , H01L21/67 , H01L21/677 , H01L31/032 , B05D1/26
CPC分类号： H01L31/18 , B05D1/26 , B05D2252/02 , B05D2252/04 , H01L21/6715 , H01L21/67173 , H01L21/6776 , H01L31/0322 , Y02E10/541 , Y02E10/543 , Y02P70/521
摘要： A coating apparatus including a coating part which has a nozzle which ejects a liquid material including an oxidizable metal from a tip portion, and a relative driving unit which moves a substrate and the nozzle in relation to each other so that the tip portion passes through the substrate, such that at least the tip portion of the nozzle provides an affinity control part which is formed so that affinity between the affinity control part and the liquid material is less than that between the liquid materials.
摘要翻译： 一种涂布装置，其具有涂布部，该涂布部具有从顶端部喷射包含可氧化金属的液体材料的喷嘴，以及相对驱动部，其相对于彼此移动基板和喷嘴，使得前端部穿过 使得喷嘴的至少尖端部分提供亲和力控制部分，该亲和控制部分形成为使亲和控制部分和液体材料之间的亲和力小于液体材料之间的亲和力。
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2.发明授权Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate 有权涂覆装置包括用于向基材施加液体的室，传感器，去除单元和控制装置公开(公告)号：US09186696B2
公开(公告)日：2015-11-17
申请号：US12874984
申请日：2010-09-02
IPC分类号： B05C11/00 , B05C11/10 , B05C5/00 , C23C16/52 , H01L21/67 , H01L21/677 , H01L31/0216 , H01L31/032 , H01L31/18 , B41J2/045
CPC分类号： B05C11/1015 , B05C5/005 , B41J2/04566 , C23C16/52 , H01L21/6715 , H01L21/67173 , H01L21/6776 , H01L31/02167 , H01L31/0322 , H01L31/18 , Y02E10/541 , Y02P70/521
摘要： A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate, a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the substrate is transported, and a removal unit which removes the liquid material from the inside of the chamber when at least one of oxygen concentration and humidity inside the chamber exceeds a threshold value.
摘要翻译： 一种涂布装置，包括：涂布部，其将包含可氧化金属的液体材料涂布在基板上;具有涂布空间的室，其中所述涂布部将所述液体材料施加到所述基板上;以及输送空间，所述基板被输送到所述输送空间中;以及 当所述室内的氧浓度和湿度中的至少一个超过阈值时，所述去除单元从所述室的内部除去所述液体材料。
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公开(公告)号：US20110059248A1
公开(公告)日：2011-03-10
申请号：US12871710
申请日：2010-08-30
CPC分类号： H01L31/0322 , C23C18/1204 , C23C18/1275 , H01L21/02568 , H01L21/02614 , H01L21/02628 , H01L21/6715 , H01L21/67173 , H01L21/6776 , Y02E10/541
摘要： A coating method including coating a liquid material including an oxidizable metal on a substrate, and heating the substrate having the liquid material coated thereon in the presence of an inert gas.
摘要翻译： 一种涂覆方法，包括在基材上涂覆包含可氧化金属的液体材料，并且在惰性气体存在下加热其上涂有液体材料的基材。
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公开(公告)号：US20070152173A1
公开(公告)日：2007-07-05
申请号：US11712949
申请日：2007-03-02
IPC分类号： H01J37/08
CPC分类号： H01J37/3171 , H01J2237/24507 , H01J2237/24528 , H01J2237/30455 , H01J2237/31703
摘要： An ion implantation apparatus includes an ion irradiation unit. The ion irradiation unit irradiates a plurality of areas of a target substrate with ion beams each of which reaches the substrate at corresponding one incident angle. An incident angle measuring instrument measures the incident angle of each of the ion beams. A controller is provided with information from the incident angle measuring instrument and controls the ion irradiation unit in accordance with the information so that a difference among incident angles is set to within ±0.1°.
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公开(公告)号：US20050100801A1
公开(公告)日：2005-05-12
申请号：US10983726
申请日：2004-11-09
申请人： Tadahiko Hirakawa , Hiroshi Kumano
发明人： Tadahiko Hirakawa , Hiroshi Kumano
IPC分类号： G03F1/20 , H01L21/027 , H01L21/266 , H01L21/302 , H01L23/12 , G03F9/00 , G03C5/00
CPC分类号： G03F1/20 , H01J2237/31711
摘要： To provide a stencil mask that the heat generated in the surface of the stencil mask can be radiated to a supporting substrate supporting a portion around the edge of a thin film quickly and a method of producing the same. A stencil mask has a thin film having an aperture pattern and a supporting substrate supporting a portion around the edge of a thin film and a method of producing the same, and a stencil mask and the method of producing the same has an aspect that a plug that having heat conductance higher than that of a thin film and a supporting substrate is embedded in a state of contacting a thin film and reaches inside of a supporting substrate.
摘要翻译： 为了提供一种模版掩模，可以将模板掩模表面产生的热量迅速地辐射到支撑薄膜边缘附近的支撑基板上，以及制造该模板的方法。 模板掩模具有具有孔径图案的薄膜和支撑薄膜边缘周围的部分的支撑基板及其制造方法，并且模板掩模及其制造方法具有以下方面：插头 具有高于薄膜和支撑衬底的导热性的薄膜被嵌入到接触薄膜并到达支撑衬底内部的状态。
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公开(公告)号：US20130280844A1
公开(公告)日：2013-10-24
申请号：US13878964
申请日：2011-10-12
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , B05D1/26 , B05D2252/02 , B05D2252/04 , H01L21/6715 , H01L21/67173 , H01L21/6776 , H01L31/0322 , Y02E10/541 , Y02E10/543 , Y02P70/521
摘要： A coating apparatus including a coating part which has a nozzle which ejects a liquid material including an oxidizable metal from a tip portion, and a relative driving unit which moves a substrate and the nozzle in relation to each other so that the tip portion passes through the substrate, such that at least the tip portion of the nozzle provides an affinity control part which is formed so that affinity between the affinity control part and the liquid material is less than that between the liquid materials.
摘要翻译： 一种涂布装置，其具有涂布部，该涂布部具有从顶端部喷射包含可氧化金属的液体材料的喷嘴，以及相对驱动部，其相对于彼此移动基板和喷嘴，使得前端部穿过 使得喷嘴的至少尖端部分提供亲和力控制部分，该亲和控制部分形成为使亲和控制部分和液体材料之间的亲和力小于液体材料之间的亲和力。
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7.发明授权Coating apparatus including a glove part and a controller for stopping coating 有权涂覆装置包括手套部分和用于停止涂覆的控制器公开(公告)号：US08485126B2
公开(公告)日：2013-07-16
申请号：US12874117
申请日：2010-09-01
CPC分类号： H01L31/0322 , B05B16/20 , B05B16/60 , B05B16/95 , H01L21/02568 , H01L21/02614 , H01L21/02623 , Y02E10/541
摘要： A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate; a chamber having a coating section in which the coating part applies the liquid material on the substrate and a transport section into which the liquid material is transported; an adjusting part which adjusts at least one of oxygen concentration and humidity inside the chamber; and a control part which stops an operation of the coating part in response to the entrance of foreign object into the chamber.
摘要翻译： 一种涂布装置，包括：涂布部，其在基材上涂布包含可氧化金属的液体材料; 具有涂布部的室，其中所述涂布部将所述液体材料施加到所述基板上;以及运送部，所述液体材料被输送到所述输送部中; 调节部，其调节所述室内的氧浓度和湿度中的至少一个; 以及控制部，其响应于异物进入室而停止涂布部的操作。
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公开(公告)号：US20110059245A1
公开(公告)日：2011-03-10
申请号：US12874984
申请日：2010-09-02
CPC分类号： B05C11/1015 , B05C5/005 , B41J2/04566 , C23C16/52 , H01L21/6715 , H01L21/67173 , H01L21/6776 , H01L31/02167 , H01L31/0322 , H01L31/18 , Y02E10/541 , Y02P70/521
摘要： A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate, a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the substrate is transported, and a removal unit which removes the liquid material from the inside of the chamber when at least one of oxygen concentration and humidity inside the chamber exceeds a threshold value.
摘要翻译： 一种涂布装置，包括：涂布部，其将包含可氧化金属的液体材料涂布在基板上;具有涂布空间的室，其中所述涂布部将所述液体材料施加到所述基板上;以及输送空间，所述基板被输送到所述输送空间中;以及 当所述室内的氧浓度和湿度中的至少一个超过阈值时，所述去除单元从所述室的内部除去所述液体材料。
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公开(公告)号：US07227159B2
公开(公告)日：2007-06-05
申请号：US10950633
申请日：2004-09-28
IPC分类号： H01J37/317
CPC分类号： H01J37/3171 , H01J2237/24507 , H01J2237/24528 , H01J2237/30455 , H01J2237/31703
摘要： An ion implantation apparatus includes an ion irradiation unit. The ion irradiation unit irradiates a plurality of areas of a target substrate with ion beams each of which reaches the substrate at corresponding one incident angle. An incident angle measuring instrument measures the incident angle of each of the ion beams. A controller is provided with information from the incident angle measuring instrument and controls the ion irradiation unit in accordance with the information so that a difference among incident angles is set to within ±0.1°.
摘要翻译： 离子注入装置包括离子照射单元。 离子照射单元以对应的一个入射角度向基板的离子束照射目标基板的多个区域。 入射角测量仪测量每个离子束的入射角。 向控制器提供来自入射角度测量仪器的信息，并根据该信息控制离子照射单元，使得入射角之间的差设定在±0.1°以内。
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公开(公告)号：US20110059250A1
公开(公告)日：2011-03-10
申请号：US12874101
申请日：2010-09-01
CPC分类号： H01L31/0322 , H01L21/02568 , H01L21/02614 , H01L21/02628 , H01L21/6715 , H01L21/67173 , H01L21/6776 , Y02E10/541
摘要： A coating method including coating a liquid material including an oxidizable metal on a substrate a plurality of times to laminate a plurality of liquid material layers on the substrate; and adjusting at least one of oxygen concentration and humidity inside a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the liquid material is transported.
摘要翻译： 一种涂布方法，包括在基材上多次涂布包含可氧化金属的液体材料以在基板上层压多个液体材料层; 以及调节在具有涂覆部分的涂覆空间的腔室内的氧浓度和湿度中的至少一个，其中所述涂覆部分将液体材料施加在基底上，以及输送液体材料的运送空间。
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