Invention Grant
- Patent Title: Antireflection coating using self-assembly nano structure and manufacture method thereof
- Patent Title (中): 使用自组装纳米结构的抗反射涂层及其制造方法
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Application No.: US13906618Application Date: 2013-05-31
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Publication No.: US09190541B2Publication Date: 2015-11-17
- Inventor: Jin-Dong Song , Eunhye Lee , Min Hwan Bae , Won Jun Choi , Jae Jin Yoon , Il Ki Han
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2013-0012165 20130204
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L31/0216 ; H01L33/44
Abstract:
In an aspect of the present disclosure, there is disclosed a manufacture method of an antireflection coating using a self-assembly nano structure, which includes forming a first metal droplet on a substrate by means of droplet epitaxy, depositing a first non-metal on the formed first metal droplet, and forming a first nano compound crystal by means of self-assembly of the deposited first non-metal and the first metal droplet.
Public/Granted literature
- US20140217441A1 ANTIREFLECTION COATING USING SELF-ASSEMBLY NANO STRUCTURE AND MANUFACTURE METHOD THEREOF Public/Granted day:2014-08-07
Information query
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