Invention Grant
- Patent Title: Process for performing automated mineralogy
- Patent Title (中): 执行自动化矿物学的过程
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Application No.: US13730358Application Date: 2012-12-28
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Publication No.: US09194829B2Publication Date: 2015-11-24
- Inventor: Michael D. Smith , Kurt Moeller
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; John E. Hillert
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/21 ; G01N23/22 ; G01N23/225

Abstract:
A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.
Public/Granted literature
- US20140183357A1 Process for Performing Automated Mineralogy Public/Granted day:2014-07-03
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