公开(公告)号：US09194829B2

公开(公告)日：2015-11-24

申请号：US13730358

申请日：2012-12-28

Applicant: FEI Company

Inventor： Michael D. Smith ,  Kurt Moeller

IPC: H01J37/20 ,  H01J37/21 ,  G01N23/22 ,  G01N23/225

CPC classification number: G01N23/2252 ,  G01N23/203 ,  G01N23/2251 ,  G01N2223/072 ,  G01N2223/076 ,  G01N2223/079 ,  G01N2223/305 ,  G01N2223/32 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/20 ,  H01J37/21

Abstract: A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.

Abstract translation: 使用电子显微镜测定样品的矿物质含量的方法和系统。 该方法包括将电子束引向样品的感兴趣区域，感兴趣的区域包含未知的矿物组成。 确定显微镜的后向散射电子检测器与样品的感兴趣区域之间的工作距离。 对于工作距离和预定工作距离之间的差异进行补偿，其中预定工作距离是为检测的反向散射电子提供期望的灰度值的工作距离。 补偿工作距离变化的一种方法是使用显微镜的自动对焦功能来调整工作距离。 然后检测来自样品感兴趣区域的反向散射电子。

公开(公告)号：US20140183357A1

公开(公告)日：2014-07-03

申请号：US13730358

申请日：2012-12-28

Applicant: FEI Company

Inventor： Michael D. Smith ,  Kurt Moeller

IPC: G01N23/225

CPC classification number: G01N23/2252 ,  G01N23/203 ,  G01N23/2251 ,  G01N2223/072 ,  G01N2223/076 ,  G01N2223/079 ,  G01N2223/305 ,  G01N2223/32 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/20 ,  H01J37/21

Abstract: A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.

Abstract translation: 使用电子显微镜测定样品的矿物质含量的方法和系统。 该方法包括将电子束引向样品的感兴趣区域，感兴趣的区域包含未知的矿物组成。 确定显微镜的后向散射电子检测器与样品的感兴趣区域之间的工作距离。 对于工作距离和预定工作距离之间的差异进行补偿，其中预定工作距离是为检测的反向散射电子提供期望的灰度值的工作距离。 补偿工作距离变化的一种方法是使用显微镜的自动对焦功能来调整工作距离。 然后检测来自样品感兴趣区域的反向散射电子。