公开(公告)号：US09194829B2

公开(公告)日：2015-11-24

申请号：US13730358

申请日：2012-12-28

Applicant: FEI Company

Inventor： Michael D. Smith ,  Kurt Moeller

IPC: H01J37/20 ,  H01J37/21 ,  G01N23/22 ,  G01N23/225

CPC classification number: G01N23/2252 ,  G01N23/203 ,  G01N23/2251 ,  G01N2223/072 ,  G01N2223/076 ,  G01N2223/079 ,  G01N2223/305 ,  G01N2223/32 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/20 ,  H01J37/21

Abstract: A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.

Abstract translation: 使用电子显微镜测定样品的矿物质含量的方法和系统。 该方法包括将电子束引向样品的感兴趣区域，感兴趣的区域包含未知的矿物组成。 确定显微镜的后向散射电子检测器与样品的感兴趣区域之间的工作距离。 对于工作距离和预定工作距离之间的差异进行补偿，其中预定工作距离是为检测的反向散射电子提供期望的灰度值的工作距离。 补偿工作距离变化的一种方法是使用显微镜的自动对焦功能来调整工作距离。 然后检测来自样品感兴趣区域的反向散射电子。

公开(公告)号：US20140191125A1

公开(公告)日：2014-07-10

申请号：US14147884

申请日：2014-01-06

Applicant: FEI Company

Inventor： Matthew Barrett ,  Michael D. Smith ,  Michal Geryk ,  Paul Scagnetti ,  Richard Tovey

IPC: H01J37/20 ,  H01J37/16

CPC classification number: H01J37/20 ,  G01N2223/307 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/16 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/28 ,  H01J2237/2826

Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

Abstract translation: 样品架组件包括样品托盘，基板，载物台和安装在载物台上的校准标准品。 底板底部的三个配合结构与安装在扫描电镜样品台上的台架上的相应结构配合。 可选的接触导体提供台架和基板之间的电接触，使得通过电子束在样品上产生的电荷可以使样品通过样品导电层到样品托盘，到基板，到载物台， 并通过接地阶段。

公开(公告)号：US09087673B2

公开(公告)日：2015-07-21

申请号：US14147884

申请日：2014-01-06

Applicant: FEI Company

Inventor： Matthew Barrett ,  Michael D. Smith ,  Michal Geryk ,  Paul Scagnetti ,  Richard Tovey

IPC: H01J37/20 ,  H01J37/16

CPC classification number: H01J37/20 ,  G01N2223/307 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/16 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/28 ,  H01J2237/2826

Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

Abstract translation: 样品架组件包括样品托盘，基板，载物台和安装在载物台上的校准标准品。 底板底部的三个配合结构与安装在扫描电镜样品台上的台架上的相应结构配合。 可选的接触导体提供台架和基板之间的电接触，使得通过电子束在样品上产生的电荷可以使样品通过样品导电层到样品托盘，到基板，到载物台， 并通过接地阶段。

公开(公告)号：US20140183357A1

公开(公告)日：2014-07-03

申请号：US13730358

申请日：2012-12-28

Applicant: FEI Company

Inventor： Michael D. Smith ,  Kurt Moeller

IPC: G01N23/225

CPC classification number: G01N23/2252 ,  G01N23/203 ,  G01N23/2251 ,  G01N2223/072 ,  G01N2223/076 ,  G01N2223/079 ,  G01N2223/305 ,  G01N2223/32 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/20 ,  H01J37/21

Abstract: A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.

Abstract translation: 使用电子显微镜测定样品的矿物质含量的方法和系统。 该方法包括将电子束引向样品的感兴趣区域，感兴趣的区域包含未知的矿物组成。 确定显微镜的后向散射电子检测器与样品的感兴趣区域之间的工作距离。 对于工作距离和预定工作距离之间的差异进行补偿，其中预定工作距离是为检测的反向散射电子提供期望的灰度值的工作距离。 补偿工作距离变化的一种方法是使用显微镜的自动对焦功能来调整工作距离。 然后检测来自样品感兴趣区域的反向散射电子。