Invention Grant
- Patent Title: Thermal anneal using word-line heating element
- Patent Title (中): 使用字线加热元件进行热退火
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Application No.: US14097503Application Date: 2013-12-05
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Publication No.: US09202572B2Publication Date: 2015-12-01
- Inventor: Gary B. Bronner , Brent S. Haukness , Mark A. Horowitz , Mark D. Kellam , Fariborz Assaderaghi
- Applicant: Rambus Inc.
- Applicant Address: US CA Sunnyvale
- Assignee: Rambus Inc.
- Current Assignee: Rambus Inc.
- Current Assignee Address: US CA Sunnyvale
- Agent Charles Shemwell
- Main IPC: G11C16/00
- IPC: G11C16/00 ; G11C16/06 ; G11C13/00 ; G11C7/04 ; H01L21/324
Abstract:
In response to detecting an event during operation of an integrated-circuit memory device containing charge-storing memory cells, an electric current is enabled to flow through a word line coupled to the charge-storing memory cells for a brief interval to heat the charge-storing memory cells to an annealing temperature range.
Public/Granted literature
- US20140254286A1 THERMAL ANNEAL USING WORD-LINE HEATING ELEMENT Public/Granted day:2014-09-11
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