Invention Grant
- Patent Title: Multi-platen multi-head polishing architecture
- Patent Title (中): 多压头多头抛光结构
-
Application No.: US13791617Application Date: 2013-03-08
-
Publication No.: US09227293B2Publication Date: 2016-01-05
- Inventor: Jeffrey Drue David , Boguslaw A. Swedek , Doyle E. Bennett , Thomas H. Osterheld , Benjamin Cherian , Dominic J. Benvegnu , Harry Q. Lee , Allen L. D'Ambra , Jagan Rangarajan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/00
- IPC: B24B37/00 ; B24B37/005 ; B24B37/013 ; B24B37/04 ; B24B37/34

Abstract:
A polishing apparatus includes a plurality of stations supported on a platform, the plurality of stations including at least two polishing stations and a transfer station, each polishing station including a platen to support a polishing pad, a plurality of carrier heads suspended from and movable along a track such that each polishing station is selectively positionable at the stations, and a controller configured to control motion of the carrier heads along the track such that during polishing at each polishing station only a single carrier head is positioned in the polishing station.
Public/Granted literature
- US20140141695A1 Multi-Platen Multi-Head Polishing Architecture Public/Granted day:2014-05-22
Information query