Invention Grant
US09227293B2 Multi-platen multi-head polishing architecture 有权
多压头多头抛光结构

Multi-platen multi-head polishing architecture
Abstract:
A polishing apparatus includes a plurality of stations supported on a platform, the plurality of stations including at least two polishing stations and a transfer station, each polishing station including a platen to support a polishing pad, a plurality of carrier heads suspended from and movable along a track such that each polishing station is selectively positionable at the stations, and a controller configured to control motion of the carrier heads along the track such that during polishing at each polishing station only a single carrier head is positioned in the polishing station.
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