Invention Grant
- Patent Title: Micropatterned component and method for manufacturing a micropatterned component
- Patent Title (中): 微图案组件和用于制造微图案组件的方法
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Application No.: US14120386Application Date: 2014-05-14
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Publication No.: US09229020B2Publication Date: 2016-01-05
- Inventor: Johannes Classen
- Applicant: Johannes Classen
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102013208825 20130514
- Main IPC: G01L1/14
- IPC: G01L1/14 ; G01P1/00 ; G01P15/08 ; G01C19/5755 ; G01P15/097 ; G01P15/125 ; B81B3/00

Abstract:
A micropatterned component, for measuring accelerations and/or yaw rates, including a substrate having a principal plane of extension of the substrate, an electrode, and a further electrode; the electrode having a principal plane of extension of the electrode, and the further electrode having a principal plane of extension of the further electrode; the principal plane of extension of the electrode being set parallelly to a normal direction perpendicular to the principal plane of extension of the substrate; the principal plane of extension of the further electrode being set parallelly to the normal direction; the electrode having an electrode height extending in the normal direction; the electrode having a flow channel extending completely through the electrode in a direction parallel to the principal plane of extension of the substrate; the flow channel having a channel depth extending parallelly to the normal direction; the channel depth being less than the electrode height.
Public/Granted literature
- US20140339654A1 MICROPATTERNED COMPONENT AND METHOD FOR MANUFACTURING A MICROPATTERNED COMPONENT Public/Granted day:2014-11-20
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