Invention Grant
US09230837B2 Multizone control of lamps in a conical lamphead using pyrometers
有权
使用高温计对锥形灯头中的灯进行多区域控制
- Patent Title: Multizone control of lamps in a conical lamphead using pyrometers
- Patent Title (中): 使用高温计对锥形灯头中的灯进行多区域控制
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Application No.: US14292300Application Date: 2014-05-30
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Publication No.: US09230837B2Publication Date: 2016-01-05
- Inventor: Joseph M. Ranish , Paul Brillhart , Jose Antonio Marin , Satheesh Kuppurao , Balasubramanian Ramachandran , Swaminathan T. Srinivasan , Mehmet Tugrul Samir
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H05B6/66 ; B05C11/00 ; H01L21/67 ; H01L21/02
Abstract:
A substrate processing apparatus is provided. The substrate processing apparatus includes a vacuum chamber having a dome and a floor. A substrate support is disposed inside the vacuum chamber. A plurality of thermal lamps are arranged in a lamphead and positioned proximate the floor of the vacuum chamber. A reflector is disposed proximate the dome, where the reflector and the dome together define a thermal control space. The substrate processing apparatus further includes a plurality of power supplies coupled to the thermal lamps and a controller for adjusting the power supplies to control a temperature in the vacuum chamber.
Public/Granted literature
- US20140273419A1 MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS Public/Granted day:2014-09-18
Information query
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