Invention Grant
- Patent Title: Vacuum control valve and vacuum control apparatus
- Patent Title (中): 真空控制阀和真空控制装置
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Application No.: US13957299Application Date: 2013-08-01
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Publication No.: US09234595B2Publication Date: 2016-01-12
- Inventor: Masayuki Kouketsu , Hiroshi Itafuji
- Applicant: CKD CORPORATION
- Applicant Address: JP Komaki-Shi, Aichi
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Komaki-Shi, Aichi
- Agency: Beyer Law Group LLP
- Priority: JP2011-020586 20110202
- Main IPC: F16K31/00
- IPC: F16K31/00 ; F16K31/02 ; F16K3/06 ; F16K31/126 ; F16K51/02 ; F16J1/01 ; H01L21/67

Abstract:
A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.
Public/Granted literature
- US20130313458A1 VACUUM CONTROL VALVE AND VACUUM CONTROL APPARATUS Public/Granted day:2013-11-28
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