发明授权
- 专利标题: Process for producing a double-gate field-effect device having independent gates
- 专利标题(中): 具有独立栅极的双栅场效应器件的制造方法
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申请号: US14429153申请日: 2013-09-18
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公开(公告)号: US09236262B2公开(公告)日: 2016-01-12
- 发明人: Philippe Coronel
- 申请人: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Oliff PLC
- 优先权: FR1202479 20120918
- 国际申请: PCT/FR2013/000246 WO 20130918
- 国际公布: WO2014/044929 WO 20140327
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/28 ; H01L29/66 ; H01L29/786 ; H01L21/033 ; H01L29/40
摘要:
A substrate of SOI type is covered by an etching mask defining three distinct semiconductor patterns. A lateral spacer is formed around the three patterns and performs the connection between two adjacent patterns. The buried insulating layer is eliminated so as to define a cavity which suspends a part of a first pattern. The first etching mask is eliminated. A gate dielectric is formed on two opposite main surfaces of the first pattern. The resist is deposited in the cavity and on the first pattern and is then exposed to form two patterns defining the bottom and top gates. An electrically conducting material is deposited in the cavity and on the first pattern so as to form the bottom gate and the top gate on each side of the first semiconductor material pattern.