Invention Grant
US09236269B2 Field effect transistor (FinFET) device with a planar block area to enable variable Fin pitch and width 有权
具有平面块区域的场效应晶体管(FinFET)器件,以实现可变的鳍间距和宽度

Field effect transistor (FinFET) device with a planar block area to enable variable Fin pitch and width
Abstract:
Approaches for providing a fin field effect transistor device (FinFET) with a planar block area to enable variable fin pitch and width are disclosed. Specifically, approaches are provided for forming a plurality of fins patterned from a substrate, the plurality of fins comprising: a first set of fins having a variable pitch and a variable width; and a second set of fins having a variable pitch and a uniform width, wherein the first set of fins is adjacent the second set of fins. In one approach, the first set of fins is patterned from the planar block area, which is formed over the substrate, and the second set of fins is formed using a sidewall image transfer (SIT) process.
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