Invention Grant
US09236269B2 Field effect transistor (FinFET) device with a planar block area to enable variable Fin pitch and width
有权
具有平面块区域的场效应晶体管(FinFET)器件,以实现可变的鳍间距和宽度
- Patent Title: Field effect transistor (FinFET) device with a planar block area to enable variable Fin pitch and width
- Patent Title (中): 具有平面块区域的场效应晶体管(FinFET)器件,以实现可变的鳍间距和宽度
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Application No.: US14259179Application Date: 2014-04-23
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Publication No.: US09236269B2Publication Date: 2016-01-12
- Inventor: Eric S. Kozarsky , Shiv Kumar Mishra
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GlobalFoundries Inc.
- Current Assignee: GlobalFoundries Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams Morgan, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L21/308 ; H01L27/088 ; H01L29/06

Abstract:
Approaches for providing a fin field effect transistor device (FinFET) with a planar block area to enable variable fin pitch and width are disclosed. Specifically, approaches are provided for forming a plurality of fins patterned from a substrate, the plurality of fins comprising: a first set of fins having a variable pitch and a variable width; and a second set of fins having a variable pitch and a uniform width, wherein the first set of fins is adjacent the second set of fins. In one approach, the first set of fins is patterned from the planar block area, which is formed over the substrate, and the second set of fins is formed using a sidewall image transfer (SIT) process.
Public/Granted literature
- US20150311085A1 FIELD EFFECT TRANSISTOR (FINFET) DEVICE WITH A PLANAR BLOCK AREA TO ENABLE VARIALBLE FIN PITCH AND WIDTH Public/Granted day:2015-10-29
Information query
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