Invention Grant
- Patent Title: Multi-material structures and capacitor-containing semiconductor constructions
- Patent Title (中): 多材料结构和含电容器的半导体结构
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Application No.: US14501423Application Date: 2014-09-30
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Publication No.: US09236427B2Publication Date: 2016-01-12
- Inventor: Joseph Neil Greeley , Duane M. Goodner , Vishwanath Bhat , Vassil N. Antonov , Prashant Raghu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94 ; H01L49/02 ; B82Y30/00

Abstract:
Some embodiments include a method of forming a capacitor. An opening is formed through a silicon-containing mass to a base, and sidewalls of the opening are lined with protective material. A first capacitor electrode is formed within the opening and has sidewalls along the protective material. At least some of the silicon-containing mass is removed with an etch. The protective material protects the first capacitor electrode from being removed by the etch. A second capacitor electrode is formed along the sidewalls of the first capacitor electrode, and is spaced from the first capacitor electrode by capacitor dielectric. Some embodiments include multi-material structures having one or more of aluminum nitride, molybdenum nitride, niobium nitride, niobium oxide, silicon dioxide, tantalum nitride and tantalum oxide. Some embodiments include semiconductor constructions.
Public/Granted literature
- US20150054127A1 Multi-Material Structures, Semiconductor Constructions and Methods of Forming Capacitors Public/Granted day:2015-02-26
Information query
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