Invention Grant
- Patent Title: Methods of forming replacement gate structures and fins on FinFET devices and the resulting devices
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Application No.: US14708405Application Date: 2015-05-11
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Publication No.: US09236479B2Publication Date: 2016-01-12
- Inventor: Ruilong Xie , Ajey Poovannummoottil Jacob
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDIRES Inc.
- Current Assignee: GLOBALFOUNDIRES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L27/12 ; H01L29/66 ; H01L21/84 ; H01L21/8238 ; H01L29/78 ; H01L29/423 ; H01L29/786

Abstract:
One method disclosed includes, among other things, removing a sacrificial gate structure to thereby define a replacement gate cavity, performing an etching process through the replacement gate cavity to define a fin structure in a layer of semiconductor material using a patterned hard mask exposed within the replacement gate cavity as an etch mask and forming a replacement gate structure in the replacement gate cavity around at least a portion of the fin structure.
Public/Granted literature
- US20150249152A1 METHODS OF FORMING REPLACEMENT GATE STRUCTURES AND FINS ON FINFET DEVICES AND THE RESULTING DEVICES Public/Granted day:2015-09-03
Information query
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