Invention Grant
- Patent Title: Photosensitive resin composition and method of forming pattern using the same
- Patent Title (中): 感光树脂组合物及其形成方法
-
Application No.: US14161939Application Date: 2014-01-23
-
Publication No.: US09239518B2Publication Date: 2016-01-19
- Inventor: Jin Ho Ju , Seung Bo Shim , Jun Gi Kim , Yang-Ho Jung , Hyang-Shik Kong , Byung-Uk Kim , Jin-Sun Kim , Tae-Hoon Yeo , Hyoc-Min Youn , Sang-Hoon Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2013-0016479 20130215
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/38 ; G03F7/075 ; G03F7/004 ; G03F7/022 ; G03F7/32

Abstract:
A photosensitive resin composition includes: an acrylic copolymer comprising a polymerization product of a first monomer comprising at least one selected from an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride, and a second monomer comprising an olefin-based unsaturated compound; a photosensitive component comprising at least one 1,2-quinonediazide-5-sulfonic acid ester compound selected from compounds represented by Chemical Formulae 1 to 4; a coupling agent; and a solvent, wherein a total amount of asymmetric compounds in the photosensitive component is greater than or equal to 45 area percent as determined by high performance liquid chromatography: wherein R1 is a hydroxyl group or a methyl group, and NQD is a 1,2-quinonediazide 5-sulfonyl group.
Public/Granted literature
- US20140234776A1 PHOTOSENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN USING THE SAME Public/Granted day:2014-08-21
Information query
IPC分类: