Invention Grant
- Patent Title: Passivation of nonlinear optical crystals
- Patent Title (中): 钝化非线性光学晶体
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Application No.: US13488635Application Date: 2012-06-05
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Publication No.: US09250178B2Publication Date: 2016-02-02
- Inventor: Yung-Ho Chuang , Vladimir Dribinski
- Applicant: Yung-Ho Chuang , Vladimir Dribinski
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/3563 ; C30B29/10 ; C30B33/00 ; C30B33/02 ; G01N21/59 ; G01N21/95 ; G01N21/35 ; G01N21/84 ; G01N21/88

Abstract:
The present invention includes an exposure chamber configured to contain a passivating gas having a selected hydrogen concentration, the exposure chamber further configured to contain at least one NLO crystal for exposure to the passivating gas within the chamber, a passivating gas source fluidically connected to the exposure chamber, the passivating gas source configured to supply passivating gas to an interior portion of the exposure chamber, and a substrate configured to hold the NLO crystal within the chamber, the substrate further configured to maintain a temperature of the NLO crystal at or near a selected temperature, the selected temperature being below a melting temperature of the NLO crystal.
Public/Granted literature
- US20130088706A1 HYDROGEN PASSIVATION OF NONLINEAR OPTICAL CRYSTALS Public/Granted day:2013-04-11
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