Invention Grant
- Patent Title: Counter pocket implant to improve analog gain
- Patent Title (中): 计数器口袋种植体,以提高模拟增益
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Application No.: US14222759Application Date: 2014-03-24
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Publication No.: US09252236B2Publication Date: 2016-02-02
- Inventor: Shih-Syuan Huang , Tsung-Hsing Yu , Yi-Ming Sheu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L29/66 ; H01L29/10

Abstract:
A method for improving analog gain in long channel devices associated with a semiconductor workpiece is provided. A gate oxide layer is formed on the semiconductor workpiece, and a plurality of gate structures are formed over the gate oxide layer, wherein a first pair of the plurality of gate structures define a short channel device region and a second pair of the plurality of gate structures define a long channel device region. A first ion implantation with a first dopant is performed at a first angle, wherein the first dopant is one of an n-type dopant and a p-type dopant. A second ion implantation with a second dopant is performed at a second angle, wherein the second angle is greater than the first angle. The second dopant is one or an n-type dopant and a p-type dopant that is opposite of the first dopant, and a height of the plurality of gate structures and the second angle generally prevents the second ion implantation from implanting ions into the short channel device region.
Public/Granted literature
- US20150243759A1 COUNTER POCKET IMPLANT TO IMPROVE ANALOG GAIN Public/Granted day:2015-08-27
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